Prototype Business
Tianma Japan offers high reliability and quality products that utilizes own LCD manufacturing capability/know-hows, provides various type of film deposition, patterning and glass cutting, and can be a partner who can cooperate in the development of new technologies and new products in material, processing, machine manufacturers and research institutes.
Feature of prototype
• Integrated process (deposition, patterning, cutting) |
• Various metal materials, inorganic insulating film materials, and organic insulating film materials are available |
• Support small-quantity level trial production to mass production. |
• Support design such as CAD works. |
• Support the production of products not only LCD and the contract processing of prototypes using LCD manufacturing technology, equipment, and know-how. |
• Thick Cu wiring processing with Cu plating is available. ![]() |
• Measurement such as thickness of layer for samples is an option. Please let us know. |
• Mounting IC, assembling FPC to glass are an option. Please let us know. |
• Reliability test is an option. Please let us know. |
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Available process
■Substrate processing *Process based on 550x660mm and thickness of glass:0.5mm or 0.7mm.
Process |
Equipment |
Remarks |
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Cleaning |
UV/Chemical/Highpressure/Ultrasonic/Pure water |
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Deposition |
Metal |
Sputter |
AlNd, MoNb, ITO, Cr, Cu, etc. |
Insulator (inorganic) |
P-CVD * |
SiNx, SiOx, etc. |
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Insulator (organic) |
Spin coater |
Acrylic resin, Polyimide resin |
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Semiconductor |
P-CVD, Sputter |
a-Si, InGaZnO₄ |
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Patterning Photolithography |
Coating resist |
Spin coater |
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Exposure
*Tianma Japan can support design |
Aligner |
Processing ability≥4μm |
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Stepper |
Processing ability≥4μm |
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Proximity |
Processing ability≥8μm |
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Development |
Development |
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Etching |
Dry etching |
SiOx, SiNx, Cr |
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Wet etching |
SiOx, SiNx, Cr |
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Stripping |
Amine based treatment |
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High temperature annealing(bake) |
Hot air circulation |
O2 concentration can be adjusted by N2 |
*Please refer to the following table for the thickness of each material.
*Pegarding P-CVD, film formation is possible even on small sized substrates and silicon wafers.
CVD equipment slot | CVD equipment | ITO sputter |
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Photolithography equipment slot | Stepper | Dry etching equipment |
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Table1:Deposition material, Thickness, Line width, Resistance
Below is available type of material, thickness.
|
Type |
Thickness |
Minimum line width / Spacing(μm) |
Ratio value |
Remark |
Wiring/ |
AL alloy |
30~500 |
4/5 |
5 |
With Mo Alloy lamination |
Mo alloy |
30~300 |
4/4.5 |
16 |
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ITO (Transparent conductive) |
40~150 |
4/5 |
165~800 |
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Cr |
30~50 |
4/4 |
20 |
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Cu |
30~200 |
4/9 |
3 |
Thickness, line width and spacing is just guideline.
Measurement such as thickness of layer for samples is an option. Please let us know.
Table2:Material, Thickness, Line width
|
Type |
Thickness |
Minimum line width / Spacing(μm) |
Remark |
Insulator |
SiNx |
50~1000 |
5 |
Contact hole formation available |
SiOx |
50~200 |
5 |
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Acrylic resin |
1500~25000 |
10 |
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Polyimide resin |
100~10000 |
10 |
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a-Si |
10~250 |
5 |
|
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InGaZnO₄ |
30~200 |
5 |
Thickness, line width and spacing is just guideline. If you have request, please let us know.
Measurement such as thickness of layer for samples is an option. Please let us know.
■Post-process
Available contents |
Equipment |
Remark |
Sealing |
Dispensing |
Seal width:0.5~2mm level |
ODF |
ODF equipment |
Alignment level:±6μm |
Thermosetting Seal material |
Hot air circulation |
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Slimming |
Chemical etching(outsource) |
Up to 0.2t on one side |
Cutting |
Regular cutting machine Free form cutting machine |
tolerance:±0.3mm Please ask the cutting size and free form shape. |
Injecting liquid into the cell |
Injection machine |
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Seal the injection hole (remove excess liquid, apply sealing material, and UV cure) |
Sealing Equipment UV irradiation equipment |
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Polishing edge |
Polishing machine | |
Cleaning |
Neutral detergent & Pure water cleaning |
*Orientation processing (alignment film printing, rubbing (photoalignment), etc is not available.
■Bonding
Available contents |
Equipment |
Remark |
Bonding |
Film bonding device machine |
Available size (middle size) Available size (large size) |
Sensor & Touch panel bonding |
Includes vacuum bonding UV curing treatment by OCR |
Available size 87x142~325x490mm |
OCA bonding |
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Touch panel bonding to LCD module |
Includes vacuum bonding UV curing treatment by OCR |
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OCA bonding |
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Adhesive bonding |
Film bonding device machine | Vacuum bonding equipment |
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■Plated wiring board processing
The following plated wiring processing is available.
*Processing based on 550x660mm 0.5/0.7t glass substrates is available.
Film type |
Available film thickness and line width [μm] |
Remark |
Cu plating thickness |
2~12 |
Formed on seed Cu/Ti |
Polyimide layer thickness |
6~15 |
|
Cu plating: Minimum line width/spacing |
5/5 |
Varies depending on Cu film thickness |
Contact Hole Diameter |
>10 |
Varies depending on polyimide film thickness |
Au/Ni plating thickness |
standard 0.05/3 |
Cross section |
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Case of product 1: LCD materials evaluation
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Tianma Japan offers the substrate for evaluation of Liquid Cristal , Polyimide materials.
Case of product 2: OLED materials evaluation
![]() Offering the substrate for OLED materials. |
![]() Tianma Japan Sample image |
Case of product 3: ACF material evaluation
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Tianma Japan supports test samples for evaluation ACF materials.