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Prototype Business

Tianma Japan offers high reliability and quality products that utilizes own LCD manufacturing capability/know-hows, provides various type of film deposition, patterning and glass cutting, and can be a partner who can cooperate in the development of new technologies and new products in material, processing, machine manufacturers and research institutes.

 

Feature of prototype

Integrated process (deposition, patterning, cutting)
Various metal materials, inorganic insulating film materials, and organic insulating film materials are available
Support small-quantity level trial production to mass production.
Support design such as CAD works.
Support the production of products not only LCD and the contract processing of prototypes using LCD manufacturing technology, equipment, and know-how.
Thick Cu wiring processing with Cu plating is available. 
Measurement such as thickness of layer for samples is an option. Please let us know.
Mounting IC, assembling FPC to glass are an option. Please let us know.
Reliability test is an option. Please let us know.

 

 
 

Available process

■Substrate processing              *Process based on 550x660mm and thickness of glass:0.5mm or 0.7mm.

Process

Equipment

Remarks

Cleaning

UV/Chemical/Highpressure/Ultrasonic/Pure water

 

Deposition

Metal

Sputter

AlNd, MoNb, ITO, Cr, Cu, etc.

Insulator (inorganic)

P-CVD *

SiNx, SiOx, etc.

Insulator (organic)

Spin coater

Acrylic resin, Polyimide resin

Semiconductor

P-CVD, Sputter

a-Si, InGaZnO₄

Patterning

Photolithography
 

Coating resist

Spin coater

 

Exposure

 

*Tianma Japan can support design

Aligner

Processing ability≥4μm
Overlay accuracy≤±2μm

Stepper

Processing ability≥4μm
Overlay accuracy≤±2μm

Proximity

Processing ability≥8μm
Overlay accuracy≤±3μm

Development

Development

 

Etching

Dry etching

SiOx, SiNx, Cr

Wet etching

SiOx, SiNx, Cr

Stripping

Amine based treatment

 

High temperature annealing(bake)

Hot air circulation

O2 concentration can be adjusted by N2

*Please refer to the following table for the thickness of each material.
*Pegarding P-CVD, film formation is possible even on small sized substrates and silicon wafers.

 

CVD equipment slot CVD equipment ITO sputter
CVD equipment slot CVD equipment ITO sputter
Photolithography equipment slot Stepper Dry etching equipment
Photolithography equipment slot Stepper Dry etching equipment
 

 

Table1:Deposition material, Thickness, Line width, Resistance
 Below is available type of material, thickness.

 

Type

Thickness
(nm)

Minimum line width / Spacing(μm)

Ratio value
(μΩ·cm)

Remark

Wiring/
Electrode

AL alloy

30~500

4/5

5

With Mo Alloy lamination

Mo alloy

30~300

4/4.5

16

ITO (Transparent conductive)

40~150

4/5

165~800

Cr

30~50

4/4

20

 

Cu

30~200

4/9

3

 

Thickness, line width and spacing is just guideline.
Measurement such as thickness of layer for samples is an option. Please let us know.

 

Table2:Material, Thickness, Line width

 

Type

Thickness
(nm)

Minimum line width / Spacing(μm)

Remark

Insulator

SiNx

50~1000

5

Contact hole formation available

SiOx

50~200

5

Acrylic resin

1500~25000

10

Polyimide resin

100~10000

10

 

a-Si

10~250

5

 

InGaZnO₄

30~200

5

Thickness, line width and spacing is just guideline. If you have request, please let us know.
Measurement such as thickness of layer for samples is an option. Please let us know.



■Post-process

Available contents

Equipment

Remark

Sealing

Dispensing

Seal width:0.5~2mm level

ODF
(drop material, alignment for bi-pane and UV curing)

ODF equipment
UV irradiation device

Alignment level:±6μm

Thermosetting Seal material

Hot air circulation

 

Slimming

Chemical etching(outsource)

Up to 0.2t on one side

Cutting

Regular cutting machine
Free form cutting machine
tolerance:±0.3mm
Please ask the cutting size and free form shape.

Injecting liquid into the cell

Injection machine

 

Seal the injection hole

 (remove excess liquid, apply sealing material, and UV cure)

Sealing Equipment

UV irradiation equipment

 

Polishing edge

Polishing machine  

Cleaning

Neutral detergent & Pure water cleaning  

*Orientation processing (alignment film printing, rubbing (photoalignment), etc is not available.

 

■Bonding

Available contents

Equipment

Remark

Bonding

Film bonding device machine

Available size (middle size)
 108x167~370x500mm

Available size (large size)
 200x300~650x650mm

Sensor & Touch panel bonding

Includes vacuum bonding UV curing treatment by OCR

Available size
 87x142~325x490mm

OCA bonding

Touch panel bonding to LCD module

Includes vacuum bonding UV curing treatment by OCR

OCA bonding

Adhesive bonding

Film bonding device machine Vacuum bonding equipment
Film bonding device machine

Vacuum bonding equipment

 

 

 

■Plated wiring board processing

  The following plated wiring processing is available.
  *Processing based on 550x660mm 0.5/0.7t glass substrates is available.

Film type

Available film thickness and line width [μm]

Remark

Cu plating thickness

2~12

Formed on seed Cu/Ti

Polyimide layer thickness

6~15

 

Cu plating:

 Minimum line width/spacing

5/5

Varies depending on Cu film thickness

Contact Hole Diameter

>10

Varies depending on polyimide film thickness

Au/Ni plating thickness

standard 0.05/3

 
 

Cross section

Film bonding device machine
 
 

Case of product 1: LCD materials evaluation

 

Tianma Japan offers the substrate for evaluation of Liquid Cristal , Polyimide materials.

 

Case of product 2: OLED materials evaluation


Offering the substrate for OLED materials.
 
Tianma Japan Sample image
 

Case of product 3: ACF material evaluation


 
 

Tianma Japan supports test samples for evaluation ACF materials.